Optonyx offers something truly unique from SIOS Messtechnik. A nano positioning and nano measuring machine that is used for three dimensional coordinate measurements in a range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm.

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With a unique sensor arrangement the machine provides Abbe error free measurements on all three coordinate axes. The measurement itself can be made with a probe according to customer requirements. Examples are laser focus sensors (LFS), scanning tunneling microscope (STM), scanning atomic force microscope (S-AFM), capacitive or inductive sensing systems.

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NMM-1 Nano Positioning and Nano Measuring Machine

The machine can be applied to position, manipulate, process and measure objects for micromechanics, microelectronics, MEMS, optics, molecular biology and microsystems engineering. The working area of the nano measuring machine is much larger than a standard AFM and it can still achieve 0.1 nm precision over the entire range.

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For more information about SIOS and the nano measurement machine, please see links under Partners or under Dialogue/Downloads.

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Please contact us to discuss nano measurements.

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